ʻO ka wehe ʻana i nā ʻenekini liʻiliʻi a ikaika loa o ka honua

Piezoelectric ultrasonic motors i elua waiwai nui, 'o ia hoʻi ko lakou ikehu kiʻekiʻe a me ko lakou 'ano maʻalahi, ka mea a elua i kokua i ko lakou miniaturization.Ua kūkulu mākou i ka prototype micro ultrasonic motor me ka hoʻohana ʻana i kahi stator me ka nui o kahi millimeter cubic.Ua hōʻike kā mākou mau hoʻokolohua e hoʻopuka ana ka mīkini prototype i kahi torque ʻoi aku ma mua o 10 μNm me kahi stator cubic millimeter.ʻO kēia kaʻa moʻokala ka mea liʻiliʻi liʻiliʻi ka mīkini kani ultrasonic i kūkulu ʻia me kahi torque kūpono.

Pono nā micro actuators no nā noi he nui, mai nā polokalamu kelepona a hiki i nā mea lapaʻau liʻiliʻi invasive.Eia naʻe, ʻo nā palena e pili ana i kā lākou hana ʻana ua kaupalena ʻia ko lākou hoʻolaha ʻana ma ka pālākiō hoʻokahi millimeter.Pono nā mīkini electromagnetic maʻamau i ka miniaturization o nā mea paʻakikī e like me nā coils, magnets, a me nā bearings, a hōʻike i ka dissipation torque koʻikoʻi ma muli o ka scaling.Hiki i nā motika electrostatic ke hoʻonui i ka scalability maikaʻi loa ma o ka hoʻohana ʻana i ka ʻenehana microelectromechanical system (MEMS), akā ua kaupalena kā lākou ikaika hoʻokele nāwaliwali i kā lākou hoʻomohala hou.
Manaʻo ʻia nā mīkini kani ultrasonic Piezoelectric e lilo i micromotors kiʻekiʻe ma muli o ko lākou kiʻekiʻe torque density a me nā mea maʻalahi.ʻO ka mīkini kani kani kani liʻiliʻi loa i hōʻike ʻia i kēia lā he ʻāpana metala me ke anawaena o 0.25 mm a me ka lōʻihi o 1 mm.Eia nō naʻe, ʻo kona nui holoʻokoʻa, me ka mīkini preload, ʻoi aku ka nui o 2-3 mm, a ʻoi aku ka liʻiliʻi o kāna waiwai torque (47 nNm) no ka hoʻohana ʻana ma ke ʻano he mea hana i nā noi he nui.
ʻO Tomoaki Mashimo, he mea noiʻi ma ke Kulanui o ʻenehana ʻo Toyohashi, ke hoʻomohala nei i kahi mīkini kani kani ultrasonic me ka stator cubic millimeter, e like me ka hōʻike ʻana ma ka Fig.Hiki ke hoʻemi ʻia ka stator, kahi pahu metala me ka puka puka a me ka plate-piezoelectric element i hoʻopaʻa ʻia i kona mau ʻaoʻao, hiki ke hoʻohaʻahaʻa ʻia me ka ʻole o ke koi ʻana i nā ʻano hana machining kūikawā a i ʻole ka hui ʻana.Ua loaʻa i ka prototype micro ultrasonic motor i ka torque kūpono o 10 μNm (Inā he radius o 1 mm ka pulley, hiki i ke kaʻa ke hāpai i kahi kaumaha 1-g) a me ka wikiwiki angular o 3000 rpm ma kahi o 70 Vp-p.He 200 mau manawa ka nui o kēia waiwai koʻikoʻi ma mua o nā mīkini micro e kū nei, a he mea kūpono loa ia no ka hoʻololi ʻana i nā mea liʻiliʻi e like me nā mea ʻike liʻiliʻi a me nā ʻāpana mechanical.